Particle filters integrated inside a silicon wafer

WJ Venstra, PN Pham, PM Sarro, J van Eijk

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)138-141
Number of pages4
JournalMicroelectronic Engineering
Volume78-79
DOIs
Publication statusPublished - 2005

Keywords

  • academic journal papers
  • ZX CWTS JFIS < 1.00

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