Particle filters integrated inside a silicon wafer

WJ Venstra, PN Pham, PM Sarro, J van Eijk

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	138-141
Number of pages	4
Journal	Microelectronic Engineering
Volume	78-79
DOIs	https://doi.org/10.1016/j.mee.2004.12.019
Publication status	Published - 2005

Keywords

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title = "Particle filters integrated inside a silicon wafer",

keywords = "academic journal papers, ZX CWTS JFIS < 1.00",

author = "WJ Venstra and PN Pham and PM Sarro and {van Eijk}, J",

year = "2005",

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language = "Undefined/Unknown",

volume = "78-79",

pages = "138--141",

journal = "Microelectronic Engineering",

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TY - JOUR

T1 - Particle filters integrated inside a silicon wafer

AU - Venstra, WJ

AU - Pham, PN

AU - Sarro, PM

AU - van Eijk, J

PY - 2005

Y1 - 2005

KW - academic journal papers

KW - ZX CWTS JFIS < 1.00

U2 - 10.1016/j.mee.2004.12.019

DO - 10.1016/j.mee.2004.12.019

M3 - Article

VL - 78-79

SP - 138

EP - 141

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -