Particle filters integrated inside a silicon wafer

WJ Venstra, PN Pham, PM Sarro, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Micro and nano engineering '04
Editors	S.n.
Place of Publication	Rotterdam
Publisher	Elsevier
Pages	1-4
Number of pages	4
Publication status	Published - 2004
Event	Micro and nano engineering '04 - Rotterdam Duration: 19 Sept 2004 → 22 Sept 2004

Name
Publisher	Elsevier

Conference	Micro and nano engineering '04
Period	19/09/04 → 22/09/04

Keywords

@inproceedings{d47e92b8a9e246baa433953bec30396d,

title = "Particle filters integrated inside a silicon wafer",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "WJ Venstra and PN Pham and PM Sarro and \{van Eijk\}, J",

year = "2004",

language = "Undefined/Unknown",

publisher = "Elsevier",

pages = "1--4",

editor = "S.n.",

booktitle = "Micro and nano engineering '04",

note = "Micro and nano engineering '04 ; Conference date: 19-09-2004 Through 22-09-2004",

}

TY - GEN

T1 - Particle filters integrated inside a silicon wafer

AU - Venstra, WJ

AU - Pham, PN

AU - Sarro, PM

AU - van Eijk, J

PY - 2004

Y1 - 2004

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1

EP - 4

BT - Micro and nano engineering '04

A2 - S.n., null

PB - Elsevier

CY - Rotterdam

T2 - Micro and nano engineering '04

Y2 - 19 September 2004 through 22 September 2004

ER -