Particle nanostructuring using atmospheric pressure ALD: assessing the process efficiency

Research output: Contribution to conferencePosterProfessional

Original languageEnglish
Publication statusPublished - 2014
EventBaltic ALD 2014 - Helsinki, Finland
Duration: 12 May 201413 May 2014

Other

OtherBaltic ALD 2014
Period12/05/1413/05/14

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