Passive photonic alignment with submicrometer repeatability and accuracy

JFC van Gurp; M Tichem; U Staufer; J Zhao

doi:10.1109/TCPMT.2013.2272419

Passive photonic alignment with submicrometer repeatability and accuracy

JFC van Gurp, M Tichem, U Staufer, J Zhao

Micro and Nano Engineering

Research output: Contribution to journal › Article › Scientific › peer-review

9 Citations (Scopus)

Original language	English
Pages (from-to)	1971-1979
Number of pages	9
Journal	IEEE Transactions on Components, Packaging and Manufacturing Technology
Volume	3
Issue number	11
DOIs	https://doi.org/10.1109/TCPMT.2013.2272419
Publication status	Published - 2013

Bibliographical note

harvest

Keywords

CWTS JFIS < 0.75

Access to Document

10.1109/TCPMT.2013.2272419

Cite this

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title = "Passive photonic alignment with submicrometer repeatability and accuracy",

keywords = "CWTS JFIS < 0.75",

author = "{van Gurp}, JFC and M Tichem and U Staufer and J Zhao",

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language = "English",

volume = "3",

pages = "1971--1979",

journal = "IEEE Transactions on Components, Packaging and Manufacturing Technology",

issn = "1521-3323",

publisher = "IEEE",

number = "11",

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TY - JOUR

T1 - Passive photonic alignment with submicrometer repeatability and accuracy

AU - van Gurp, JFC

AU - Tichem, M

AU - Staufer, U

AU - Zhao, J

N1 - harvest

PY - 2013

Y1 - 2013

KW - CWTS JFIS < 0.75

U2 - 10.1109/TCPMT.2013.2272419

DO - 10.1109/TCPMT.2013.2272419

M3 - Article

SN - 1521-3323

VL - 3

SP - 1971

EP - 1979

JO - IEEE Transactions on Components, Packaging and Manufacturing Technology

JF - IEEE Transactions on Components, Packaging and Manufacturing Technology

IS - 11

ER -