Passive photonic alignment with submicrometer repeatability and accuracy

JFC van Gurp, M Tichem, U Staufer, J Zhao

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)1971-1979
Number of pages9
JournalIEEE Transactions on Components, Packaging and Manufacturing Technology
Volume3
Issue number11
DOIs
Publication statusPublished - 2013

Keywords

  • CWTS JFIS < 0.75

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