Patterned growth of carbon nanotubes for vertical interconnects in 3D integrated circuits

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings 13th SAFE Workshop of the STW.ICT Conference 2010
EditorsP French et al
Place of PublicationUtrecht, The Netherlands
PublisherSTW
Pages184-187
Number of pages4
ISBN (Print)978-90-73461-67-3
Publication statusPublished - 2010
Event13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands - Utrecht, The Netherlands
Duration: 18 Nov 201019 Nov 2010

Publication series

Name
PublisherSTW

Conference

Conference13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands
Period18/11/1019/11/10

Keywords

  • Conf.proc. > 3 pag

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