@inproceedings{febe6eb654ec4ae0a1e15e8d7cb211dc,
title = "Patterned growth of carbon nanotubes for vertical interconnects in 3D integrated circuits",
keywords = "Conf.proc. > 3 pag",
author = "S Vollebregt and R Ishihara and WHA Wien and {van der Cingel}, J and CIM Beenakker",
year = "2010",
language = "English",
isbn = "978-90-73461-67-3",
publisher = "STW",
pages = "184--187",
editor = "{French et al}, P",
booktitle = "Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010",
note = "13th SAFE Workshop STW.ICT Conference 2010, Veldhoven, the Netherlands ; Conference date: 18-11-2010 Through 19-11-2010",
}