Abstract
Advances in semiconductor device manufacturing technologies are enabled by the development and application of novel materials. Especially one class of materials, nanoporous films, became building blocks for a broad range of applications, such as gas sensors and interconnects. Therefore, a versatile fabrication technology is needed to integrate these films and meet the trend towards device miniaturization and high integration density. In this study, we developed a novel method to pattern nanoporous thin films with high flexibility in material selection. Herein, Au and ZnO nanoparticles were synthesized by spark ablation and printed on a Ti/TiO2 adhesion layer, which was exposed by a lithographic stencil mask. Subsequently, the photoresist was stripped by a cost-efficient lift-off process. Nanoporous patterned features were thus obtained and the finest feature has a gap width of 0.6 μ fm and a line width of 2 μ fm. Using SEM and profilometers to investigate the structure of the films, it was demonstrated that the lift-off process had a minor impact on the microstructure and thickness. The samples presented a rough surface and high porosity, indicating a large surface-to-volume ratio. This is supported by the measured conductivity of Au nanoporous film, which is 12% of the value for bulk Au. As lithographic stencil printing is compatible with conventional lithographic pattering, this method enables further application on mass production of various nanoporous film-based devices in the future.
Original language | English |
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Title of host publication | Proceedings of the 2022 IEEE 22nd International Conference on Nanotechnology (NANO) |
Publisher | IEEE |
Pages | 238-241 |
Number of pages | 4 |
ISBN (Electronic) | 978-1-6654-5225-0 |
ISBN (Print) | 978-1-6654-5226-7 |
DOIs | |
Publication status | Published - 2022 |
Event | 2022 IEEE 22nd International Conference on Nanotechnology (NANO) - Palma de Mallorca, Spain Duration: 4 Jul 2022 → 8 Jul 2022 |
Conference
Conference | 2022 IEEE 22nd International Conference on Nanotechnology (NANO) |
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Country/Territory | Spain |
City | Palma de Mallorca |
Period | 4/07/22 → 8/07/22 |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Keywords
- Nanoporous film
- Spark ablation
- Nanoparticle
- Lift-off
- Nanofabrication