Patterning of polyimide and metal in deep trenches

VG Kiutchoukov, JR Mollinger, M Shikida, A Bossche

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	208-213
Number of pages	6
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	92
Publication status	Published - 2001

Keywords

@article{9b292768aa614e14a78db7d49e2d6503,

title = "Patterning of polyimide and metal in deep trenches",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "VG Kiutchoukov and JR Mollinger and M Shikida and A Bossche",

year = "2001",

language = "Undefined/Unknown",

volume = "92",

pages = "208--213",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

}

TY - JOUR

T1 - Patterning of polyimide and metal in deep trenches

AU - Kiutchoukov, VG

AU - Mollinger, JR

AU - Shikida, M

AU - Bossche, A

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0924-4247

VL - 92

SP - 208

EP - 213

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -