PECVD SIC- SiO2-SIC Horizontal Slot Waveguides for Sensing Photonics devices

G Pandraud, A. Barbosa Neira, E Margallo Balbas, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings IEEE SENSORS 2010
EditorsG. Fedder, T. Kenney
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages975-978
Number of pages4
ISBN (Print)978-1-4244-8168-2
Publication statusPublished - 2010
EventIEEE Sensors 2010 Conference: 9th Annual IEEE Conference on Sensors - Hilton Waikoloa Village, Waikoloa, HI, United States
Duration: 1 Nov 20104 Nov 2010
Conference number: 9
http://ewh.ieee.org/conf/sensors2010/

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE Sensors 2010 Conference
CountryUnited States
CityWaikoloa, HI
Period1/11/104/11/10
Internet address

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

Cite this

Pandraud, G., Barbosa Neira, A., Margallo Balbas, E., & Sarro, PM. (2010). PECVD SIC- SiO2-SIC Horizontal Slot Waveguides for Sensing Photonics devices. In G. Fedder, & T. Kenney (Eds.), Proceedings IEEE SENSORS 2010 (pp. 975-978). IEEE Society.