PECVD Silicon Carbide

TMH Pham

Research output: ThesisDissertation (TU Delft)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Sarro, P.M., Supervisor
Award date7 Dec 2004
Print ISBNs90-9018856-6
Publication statusPublished - 2004

Keywords

  • Diss. prom. aan TU Delft

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