PECVD silicon carbide surface micriomachining technology and selected MEMS applications

V Rajaraman, L Pakula, H "extern" Yang, PJ French, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalInternational Journal of Advances in Engineering Sciences and Applied Mathematics
DOIs
Publication statusPublished - 2011

Keywords

  • Conf.proc. > 3 pag

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