@article{86f75d50e9994286976b50ab0879f04a,
title = "PECVD silicon carbide surface micriomachining technology and selected MEMS applications",
keywords = "Conf.proc. > 3 pag",
author = "V Rajaraman and L Pakula and Yang, {H {"}extern{"}} and PJ French and PM Sarro",
note = "Online publicatie d.d. 20-01-2011",
year = "2011",
doi = "10.1007/s12572-010-0020-9",
language = "English",
pages = "1--7",
journal = "International Journal of Advances in Engineering Sciences and Applied Mathematics",
issn = "0975-0770",
}