Performance analysis of choherent optical scatterometry

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	775-781
Number of pages	7
Journal	Applied Physics B: lasers and optics
Volume	105
Issue number	4
Publication status	Published - 2011

Keywords

@article{429f479f134c4d3aa72ae71ca8a2363e,

title = "Performance analysis of choherent optical scatterometry",

keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{El Gawhary}, O and N Kumar and SF Pereira",

year = "2011",

language = "English",

volume = "105",

pages = "775--781",

journal = "Applied Physics B: lasers and optics",

issn = "0946-2171",

publisher = "Springer",

number = "4",

}