Performance analysis of choherent optical scatterometry

Research output: Contribution to journalArticleScientificpeer-review

34 Citations (Scopus)
Original languageEnglish
Pages (from-to)775-781
Number of pages7
JournalApplied Physics B: lasers and optics
Volume105
Issue number4
Publication statusPublished - 2011

Keywords

  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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