@inproceedings{09eac255d7464bcaa04ca89bdaec8ff5,
title = "Performance of miniaturized LPCVD-SiN-membrane-based 7-14 micrometer infrared thermal detector:analytical,modelling and experimental study",
keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",
author = "DHB Wicaksono and F jutzi and G Pandraud and PJ French",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-1-4244-2581-5",
pages = "498--501",
booktitle = "Proceedings of IEEE Sensors 2008",
publisher = "IEEE Society",
note = "IEEE Sensors 2008 ; Conference date: 26-10-2008 Through 29-10-2008",
}