Performance of miniaturized LPCVD-SiN-membrane-based 7-14 micrometer infrared thermal detector:analytical,modelling and experimental study

DHB Wicaksono, F jutzi, G Pandraud, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of IEEE Sensors 2008
PublisherIEEE Society
Pages498-501
Number of pages4
ISBN (Print)978-1-4244-2581-5
Publication statusPublished - 2008
EventIEEE Sensors 2008 - Lecce, Italy
Duration: 26 Oct 200829 Oct 2008

Conference

ConferenceIEEE Sensors 2008
CountryItaly
CityLecce
Period26/10/0829/10/08

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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