Fingerprint
Dive into the research topics of 'Permanent stiffness reduction by thermal oxidation of silicon'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Permanent stiffness reduction by thermal oxidation of silicon
Reinier Kuppens, Just Herder, Nima Tolou
Research output: Contribution to journal › Article › Scientific › peer-review
14
Citations
(Scopus)
52
Downloads
(Pure)