| Original language | English |
|---|---|
| IPC | H01L |
| Priority date | 3/01/22 |
| Publication status | Published - 2023 |
Bibliographical note
Patent: OCT-21-047Applicant: TU Delft
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R. Ishihara (Inventor), S. Nur (Inventor), Jaime Oscar Tenorio Pearl (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| IPC | H01L |
| Priority date | 3/01/22 |
| Publication status | Published - 2023 |