Phase control and stability of thin silicon films deposited from silane diluted with hydrogen

G van Elzakker; P Sutta; FD Tichelaar; M Zeman

Phase control and stability of thin silicon films deposited from silane diluted with hydrogen

G van Elzakker, P Sutta, FD Tichelaar, M Zeman

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Phase control and stability of thin silicon films deposited from silane diluted with hydrogen
Editors	s.n.
Place of Publication	WARRENDALE,
Publisher	Materials Research Society
Pages	179-184
Number of pages	6
ISBN (Print)	978-1-55899-949-7
Publication status	Published - 2007
Event	Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2007 MRS Spring Meeting - WARRENDALE, Duration: 9 Apr 2007 → 13 Apr 2007

Publication series

Name
Publisher	MATERIALS RESEARCH SOCIETY

Name	Materials Research Society Symposium Proceedings
Volume	989
ISSN (Print)	0272-9172

Conference

Conference	Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2007 MRS Spring Meeting
Period	9/04/07 → 13/04/07

Bibliographical note

nog niet eerder opgenomen/is van 2007, kan niet meer in 2009!sb

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Geen BTA classificatie

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

van Elzakker, G., Sutta, P., Tichelaar, FD., & Zeman, M. (2007). Phase control and stability of thin silicon films deposited from silane diluted with hydrogen. In s.n. (Ed.), Phase control and stability of thin silicon films deposited from silane diluted with hydrogen (pp. 179-184). (Materials Research Society Symposium Proceedings; Vol. 989). Materials Research Society.

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title = "Phase control and stability of thin silicon films deposited from silane diluted with hydrogen",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Geen BTA classificatie",

author = "{van Elzakker}, G and P Sutta and FD Tichelaar and M Zeman",

note = "nog niet eerder opgenomen/is van 2007, kan niet meer in 2009!sb; Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2007 MRS Spring Meeting ; Conference date: 09-04-2007 Through 13-04-2007",

year = "2007",

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isbn = "978-1-55899-949-7",

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booktitle = "Phase control and stability of thin silicon films deposited from silane diluted with hydrogen",

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van Elzakker, G, Sutta, P, Tichelaar, FD & Zeman, M 2007, Phase control and stability of thin silicon films deposited from silane diluted with hydrogen. in s.n. (ed.), Phase control and stability of thin silicon films deposited from silane diluted with hydrogen. Materials Research Society Symposium Proceedings, vol. 989, Materials Research Society, WARRENDALE, pp. 179-184, Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2007 MRS Spring Meeting, 9/04/07.

Phase control and stability of thin silicon films deposited from silane diluted with hydrogen. / van Elzakker, G; Sutta, P; Tichelaar, FD et al.
Phase control and stability of thin silicon films deposited from silane diluted with hydrogen. ed. / s.n. WARRENDALE,: Materials Research Society, 2007. p. 179-184 (Materials Research Society Symposium Proceedings; Vol. 989).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Phase control and stability of thin silicon films deposited from silane diluted with hydrogen

AU - van Elzakker, G

AU - Sutta, P

AU - Tichelaar, FD

AU - Zeman, M

N1 - nog niet eerder opgenomen/is van 2007, kan niet meer in 2009!sb

PY - 2007

Y1 - 2007

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Geen BTA classificatie

M3 - Conference contribution

SN - 978-1-55899-949-7

SP - 179

EP - 184

BT - Phase control and stability of thin silicon films deposited from silane diluted with hydrogen

A2 - s.n., null

PB - Materials Research Society

CY - WARRENDALE,

T2 - Symposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2007 MRS Spring Meeting

Y2 - 9 April 2007 through 13 April 2007

ER -