Phase control and stability of thin silicon films deposited from silane diluted with hydrogen

G van Elzakker, P Sutta, FD Tichelaar, M Zeman

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationPhase control and stability of thin silicon films deposited from silane diluted with hydrogen
Editors s.n.
Place of PublicationWARRENDALE,
PublisherMaterials Research Society
Pages179-184
Number of pages6
ISBN (Print)978-1-55899-949-7
Publication statusPublished - 2007
EventSymposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2007 MRS Spring Meeting - WARRENDALE,
Duration: 9 Apr 200713 Apr 2007

Publication series

Name
PublisherMATERIALS RESEARCH SOCIETY
NameMaterials Research Society Symposium Proceedings
Volume989
ISSN (Print)0272-9172

Conference

ConferenceSymposium on Amorphous and Polycrystalline Thin-Film Silicon Science and Technology held at the 2007 MRS Spring Meeting
Period9/04/0713/04/07

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Geen BTA classificatie

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