Phase information in Coherent Fourier Scatterometry

Research output: Contribution to journalConference articleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-4
Number of pages4
JournalProceedings of SPIE- International Society for Optical Engineering
Volume8788
DOIs
Publication statusPublished - 2013

Keywords

  • CWTS 0.75 <= JFIS < 2.00

Cite this