Phase information in Coherent Fourier Scatterometry

Research output: Contribution to journal › Conference article › Scientific › peer-review

4 Citations (Scopus)

Original language	English
Pages (from-to)	1-4
Number of pages	4
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	8788
DOIs	https://doi.org/10.1117/12.2020506
Publication status	Published - 2013

8788-1 t/m 8788-4

Keywords

@article{af571ba2111b4eb5ac09ca0a63af8d75,

title = "Phase information in Coherent Fourier Scatterometry",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "N Kumar and {El Gawhary}, O and S Roy and SF Pereira and HP Urbach",

note = "8788-1 t/m 8788-4",

year = "2013",

doi = "10.1117/12.2020506",

language = "English",

volume = "8788",

pages = "1--4",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Phase information in Coherent Fourier Scatterometry

AU - Kumar, N

AU - El Gawhary, O

AU - Roy, S

AU - Pereira, SF

AU - Urbach, HP

N1 - 8788-1 t/m 8788-4

PY - 2013

Y1 - 2013

KW - CWTS 0.75 <= JFIS < 2.00

U2 - 10.1117/12.2020506

DO - 10.1117/12.2020506

M3 - Conference article

SN - 0277-786X

VL - 8788

SP - 1

EP - 4

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -