Phase retrieval applied to coherent Fourier scatterometry using the extended ptychographic iterative engine

P. Dwivedi, J. E.H.Cardoso Sakamoto, S. F. Pereira

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
74 Downloads (Pure)

Abstract

We have demonstrated that the extended ptychographic iterative engine (ePIE) algorithm can be applied to retrieve the phase information of the vectorial scattered field of a subwavelength object with the amplitude of the scattered field as input. We applied this technique combined with coherent Fourier scatterometry to determine the phase of the scattered field of a subwavelength grating, illuminated by a focused laser beam.

Original languageEnglish
Pages (from-to)1590-1599
JournalOSA Continuum
Volume2
Issue number5
DOIs
Publication statusPublished - 2019

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