Abstract
We have demonstrated that the extended ptychographic iterative engine (ePIE) algorithm can be applied to retrieve the phase information of the vectorial scattered field of a subwavelength object with the amplitude of the scattered field as input. We applied this technique combined with coherent Fourier scatterometry to determine the phase of the scattered field of a subwavelength grating, illuminated by a focused laser beam.
Original language | English |
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Pages (from-to) | 1590-1599 |
Journal | OSA Continuum |
Volume | 2 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2019 |