Photolithography on bulk micromachined substrates

WJ Venstra, JW Spronck, PM Sarro, J van Eijk

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1-6
Number of pages	6
Journal	Journal of Micromechanics and Microengineering
Volume	19
Issue number	055005
Publication status	Published - 2009

Keywords

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title = "Photolithography on bulk micromachined substrates",

keywords = "Elektrotechniek, Techniek, professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "WJ Venstra and JW Spronck and PM Sarro and {van Eijk}, J",

year = "2009",

language = "Undefined/Unknown",

volume = "19",

pages = "1--6",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

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}

TY - JOUR

T1 - Photolithography on bulk micromachined substrates

AU - Venstra, WJ

AU - Spronck, JW

AU - Sarro, PM

AU - van Eijk, J

PY - 2009

Y1 - 2009

KW - Elektrotechniek

KW - Techniek

KW - professional journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 19

SP - 1

EP - 6

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 055005

ER -