Photolithography on bulk micromachined substrates

WJ Venstra, JW Spronck, PM Sarro, J van Eijk

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1-6
Number of pages6
JournalJournal of Micromechanics and Microengineering
Issue number055005
Publication statusPublished - 2009


  • Elektrotechniek
  • Techniek
  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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