Photolithography on bulk micromachined substrates

WJ Venstra, JW Spronck, PM Sarro, J van Eijk

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1-6
Number of pages6
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number055005
Publication statusPublished - 2009

Keywords

  • Elektrotechniek
  • Techniek
  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

Cite this