Photoresist coating methods for the integration of novel 3-D RF microstructures

NP Pham, E Boellaard, JN Burghartz, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

83 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)491-499
Number of pages9
JournalIEEE Journal of Microelectromechanical Systems
Volume13
Issue number3
Publication statusPublished - 2004

Keywords

  • ZX CWTS JFIS >= 3.00

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