Photoresist wells for integrated high-speed screening arrays

BL Gray; R Moerman; LR van den Doel; VP Jordanov; PN Pham; PM Sarro; A Bossche; MJ Vellekoop

Photoresist wells for integrated high-speed screening arrays

BL Gray, R Moerman, LR van den Doel, VP Jordanov, PN Pham, PM Sarro, A Bossche, MJ Vellekoop

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE - ProRISC - SeSense 2001: proceedings. Semiconductor Advances for Future Eelctornics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	791-794
Number of pages	4
ISBN (Print)	90-73461-29-4
Publication status	Published - 2001
Event	SAFE ProRISC SeSens 2001, Veldhoven - Utrecht Duration: 28 Nov 2001 → 30 Nov 2001

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	SAFE ProRISC SeSens 2001, Veldhoven
Period	28/11/01 → 30/11/01

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

Gray, BL., Moerman, R., van den Doel, LR., Jordanov, VP., Pham, PN., Sarro, PM., Bossche, A., & Vellekoop, MJ. (2001). Photoresist wells for integrated high-speed screening arrays. In SAFE - ProRISC - SeSense 2001: proceedings. Semiconductor Advances for Future Eelctornics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology (pp. 791-794). STW Technology Foundation.

@inproceedings{ce4921df9f3c4fdaad0ba7d9721d9e8e,

title = "Photoresist wells for integrated high-speed screening arrays",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "BL Gray and R Moerman and {van den Doel}, LR and VP Jordanov and PN Pham and PM Sarro and A Bossche and MJ Vellekoop",

year = "2001",

language = "Undefined/Unknown",

isbn = "90-73461-29-4",

publisher = "STW Technology Foundation",

pages = "791--794",

booktitle = "SAFE - ProRISC - SeSense 2001: proceedings. Semiconductor Advances for Future Eelctornics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology",

note = "SAFE ProRISC SeSens 2001, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",

}

Gray, BL, Moerman, R, van den Doel, LR, Jordanov, VP, Pham, PN, Sarro, PM , Bossche, A & Vellekoop, MJ 2001, Photoresist wells for integrated high-speed screening arrays. in SAFE - ProRISC - SeSense 2001: proceedings. Semiconductor Advances for Future Eelctornics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. STW Technology Foundation, Utrecht, pp. 791-794, SAFE ProRISC SeSens 2001, Veldhoven, 28/11/01.

Photoresist wells for integrated high-speed screening arrays. / Gray, BL; Moerman, R; van den Doel, LR et al.
SAFE - ProRISC - SeSense 2001: proceedings. Semiconductor Advances for Future Eelctornics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. Utrecht: STW Technology Foundation, 2001. p. 791-794.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Photoresist wells for integrated high-speed screening arrays

AU - Gray, BL

AU - Moerman, R

AU - van den Doel, LR

AU - Jordanov, VP

AU - Pham, PN

AU - Sarro, PM

AU - Bossche, A

AU - Vellekoop, MJ

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-29-4

SP - 791

EP - 794

BT - SAFE - ProRISC - SeSense 2001: proceedings. Semiconductor Advances for Future Eelctornics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology

PB - STW Technology Foundation

CY - Utrecht

T2 - SAFE ProRISC SeSens 2001, Veldhoven

Y2 - 28 November 2001 through 30 November 2001

ER -

Gray BL, Moerman R, van den Doel LR, Jordanov VP, Pham PN, Sarro PM et al. Photoresist wells for integrated high-speed screening arrays. In SAFE - ProRISC - SeSense 2001: proceedings. Semiconductor Advances for Future Eelctornics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology. Utrecht: STW Technology Foundation. 2001. p. 791-794