Physical and mechanical properties of a TIR-based liquid micro deformable mirror

ES ten Have, GV Vdovin

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings SPIE - Micro-Optics 2012
EditorsH Thienpont, J Mohr, H Zappe, H Nakajima
Place of PublicationBellingham, WA, USA
PublisherSPIE
Pages84281W-1-84281W-11
ISBN (Print)9780819491206
DOIs
Publication statusPublished - 2012
EventMicro-Optics 2012, Brussels, Belgium - Bellingham, WA, USA
Duration: 16 Apr 201219 Apr 2012

Publication series

Name
PublisherSPIE
NameProceedings of SPIE- International Society for Optical Engineering
Volume8428
ISSN (Print)0277-786X

Conference

ConferenceMicro-Optics 2012, Brussels, Belgium
Period16/04/1219/04/12

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