Physical and mechanical properties of a TIR-based liquid micro deformable mirror

ES ten Have; GV Vdovin

doi:10.1117/12.927073

Physical and mechanical properties of a TIR-based liquid micro deformable mirror

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings SPIE - Micro-Optics 2012
Editors	H Thienpont, J Mohr, H Zappe, H Nakajima
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Pages	84281W-1-84281W-11
ISBN (Print)	9780819491206
DOIs	https://doi.org/10.1117/12.927073
Publication status	Published - 2012
Event	Micro-Optics 2012, Brussels, Belgium - Bellingham, WA, USA Duration: 16 Apr 2012 → 19 Apr 2012

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	8428
ISSN (Print)	0277-786X

Conference

Conference	Micro-Optics 2012, Brussels, Belgium
Period	16/04/12 → 19/04/12

Access to Document

10.1117/12.927073

Cite this

@inproceedings{fc9074e697b449a49fe23d16891cec00,

title = "Physical and mechanical properties of a TIR-based liquid micro deformable mirror",

author = "{ten Have}, ES and GV Vdovin",

year = "2012",

doi = "10.1117/12.927073",

language = "English",

isbn = "9780819491206",

publisher = "SPIE",

pages = "84281W--1--84281W--11",

editor = "H Thienpont and J Mohr and H Zappe and H Nakajima",

booktitle = "Proceedings SPIE - Micro-Optics 2012",

address = "United States",

note = "Micro-Optics 2012, Brussels, Belgium ; Conference date: 16-04-2012 Through 19-04-2012",

}

ten Have, ES & Vdovin, GV 2012, Physical and mechanical properties of a TIR-based liquid micro deformable mirror. in H Thienpont, J Mohr, H Zappe & H Nakajima (eds), Proceedings SPIE - Micro-Optics 2012. Proceedings of SPIE- International Society for Optical Engineering, vol. 8428, SPIE, Bellingham, WA, USA, pp. 84281W-1-84281W-11, Micro-Optics 2012, Brussels, Belgium, 16/04/12. https://doi.org/10.1117/12.927073

Physical and mechanical properties of a TIR-based liquid micro deformable mirror. / ten Have, ES; Vdovin, GV.
Proceedings SPIE - Micro-Optics 2012. ed. / H Thienpont; J Mohr; H Zappe; H Nakajima. Bellingham, WA, USA: SPIE, 2012. p. 84281W-1-84281W-11 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 8428).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Physical and mechanical properties of a TIR-based liquid micro deformable mirror

AU - ten Have, ES

AU - Vdovin, GV

PY - 2012

Y1 - 2012

U2 - 10.1117/12.927073

DO - 10.1117/12.927073

M3 - Conference contribution

SN - 9780819491206

SP - 84281W-1-84281W-11

BT - Proceedings SPIE - Micro-Optics 2012

A2 - Thienpont, H

A2 - Mohr, J

A2 - Zappe, H

A2 - Nakajima, H

PB - SPIE

CY - Bellingham, WA, USA

T2 - Micro-Optics 2012, Brussels, Belgium

Y2 - 16 April 2012 through 19 April 2012

ER -