Physical principles and miniaturization of spark assisted chemical engraving (SACE)

LA Hof, R Wüthrich, K Fujisaki, H Bleuler, Ph Mandin, G Picard

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

74 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of IWMF2004
Place of Publications.l.
Publishers.n.
Pages1-6
Number of pages6
Publication statusPublished - 2005
EventIWMF2004, Shanghai, China - s.l.
Duration: 15 Oct 200417 Oct 2004

Publication series

Name
Publishers.n.

Conference

ConferenceIWMF2004, Shanghai, China
Period15/10/0417/10/04

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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