Physical principles and miniaturization of spark assisted chemical engraving (SACE)

LA Hof, R Wüthrich, K Fujisaki, H Bleuler, Ph Mandin, G Picard

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

114 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings of IWMF2004
Place of Publication	s.l.
Publisher	s.n.
Pages	1-6
Number of pages	6
Publication status	Published - 2005
Event	IWMF2004, Shanghai, China - s.l. Duration: 15 Oct 2004 → 17 Oct 2004

Name
Publisher	s.n.

Conference	IWMF2004, Shanghai, China
Period	15/10/04 → 17/10/04

Editor onbekend - IT

Keywords

@inproceedings{00bbc484eff74eb59a4d9aa84450bbc0,

title = "Physical principles and miniaturization of spark assisted chemical engraving (SACE)",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "LA Hof and R W{\"u}thrich and K Fujisaki and H Bleuler and Ph Mandin and G Picard",

note = "Editor onbekend - IT; IWMF2004, Shanghai, China ; Conference date: 15-10-2004 Through 17-10-2004",

year = "2005",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "1--6",

booktitle = "Proceedings of IWMF2004",

}

TY - GEN

T1 - Physical principles and miniaturization of spark assisted chemical engraving (SACE)

AU - Hof, LA

AU - Wüthrich, R

AU - Fujisaki, K

AU - Bleuler, H

AU - Mandin, Ph

AU - Picard, G

N1 - Editor onbekend - IT

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1

EP - 6

BT - Proceedings of IWMF2004

PB - s.n.

CY - s.l.

T2 - IWMF2004, Shanghai, China

Y2 - 15 October 2004 through 17 October 2004

ER -