Piezoresistive cantilever for mechanical force sensors

T Chu Duc; JF Creemer; PJF Swart; PM Sarro

Piezoresistive cantilever for mechanical force sensors

T Chu Duc, JF Creemer, PJF Swart, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)
Editors	s.n.
Place of Publication	Utrecht
Publisher	Dutch Technology Foundation
Pages	143-146
Number of pages	4
ISBN (Print)	90-73461-50-2
Publication status	Published - 2005
Event	STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands - Utrecht Duration: 17 Nov 2005 → 18 Nov 2005

Publication series

Name
Publisher	Dutch Technology Foundation

Conference

Conference	STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands
Period	17/11/05 → 18/11/05

Bibliographical note

Editor onbekend JH/STW

Keywords

academic journal papers
Conf.proc. > 3 pag

Cite this

@inproceedings{ecb4f3310f8f41d8b463cd2e3c277af2,

title = "Piezoresistive cantilever for mechanical force sensors",

keywords = "academic journal papers, Conf.proc. > 3 pag",

author = "{Chu Duc}, T and JF Creemer and PJF Swart and PM Sarro",

note = "Editor onbekend JH/STW; STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands ; Conference date: 17-11-2005 Through 18-11-2005",

year = "2005",

language = "Undefined/Unknown",

isbn = "90-73461-50-2",

publisher = "Dutch Technology Foundation",

pages = "143--146",

editor = "s.n.",

booktitle = "Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)",

}

Chu Duc, T, Creemer, JF, Swart, PJF & Sarro, PM 2005, Piezoresistive cantilever for mechanical force sensors. in s.n. (ed.), Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). Dutch Technology Foundation, Utrecht, pp. 143-146, STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands, 17/11/05.

Piezoresistive cantilever for mechanical force sensors. / Chu Duc, T; Creemer, JF; Swart, PJF et al.
Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). ed. / s.n. Utrecht: Dutch Technology Foundation, 2005. p. 143-146.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Piezoresistive cantilever for mechanical force sensors

AU - Chu Duc, T

AU - Creemer, JF

AU - Swart, PJF

AU - Sarro, PM

N1 - Editor onbekend JH/STW

PY - 2005

Y1 - 2005

KW - academic journal papers

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-73461-50-2

SP - 143

EP - 146

BT - Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)

A2 - s.n., null

PB - Dutch Technology Foundation

CY - Utrecht

T2 - STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands

Y2 - 17 November 2005 through 18 November 2005

ER -