Piezoresistive cantilever for nano-Newton sensing in two dimensions

T Chu Duc, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

5 Citations (Scopus)

Name
Publisher	IEEE

Keywords

@inproceedings{8a3585a4b2f24c6b856293a52589ae79,

title = "Piezoresistive cantilever for nano-Newton sensing in two dimensions",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "{Chu Duc}, T and JF Creemer and PM Sarro",

year = "2006",

language = "Undefined/Unknown",

isbn = "0-7803-9476-3",

publisher = "IEEE",

pages = "586--589",

editor = "s.n.",

booktitle = "Proc. IEEE MEMS 2006 Conference",

address = "United States",

}