Piezoresistive cantilever for nano-Newton sensing in two dimensions

T Chu Duc, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. IEEE MEMS 2006 Conference
Editors s.n.
Place of PublicationIstanbul, Turkey
PublisherIEEE Society
Pages586-589
Number of pages4
ISBN (Print)0-7803-9476-3
Publication statusPublished - 2006

Publication series

Name
PublisherIEEE

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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