Pillar structures with a sub-micron space fabricated by macroporous-based micromachining

H Ohji, S Izuo, PJ French, K Tsutsumi

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)744-748
Number of pages5
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
VolumeA 97-98
Publication statusPublished - 2002

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS 1.00 <= JFIS < 3.00

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