@article{8700b52fca504ff19a2f67b93ea00e8e,
title = "Pillar structures with a sub-micron space fabricated by macroporous-based micromachining",
keywords = "Elektrotechniek, Techniek, ZX CWTS 1.00 <= JFIS < 3.00",
author = "H Ohji and S Izuo and PJ French and K Tsutsumi",
year = "2002",
language = "Undefined/Unknown",
volume = "A 97-98",
pages = "744--748",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
}