@inproceedings{9f64c0155e6f47489e6cccfa6e7e8ddc,
title = "Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "H Ohji and S Izuo and PJ French and K Tsutsumi",
year = "2001",
language = "Undefined/Unknown",
isbn = "3-540-42150-5",
publisher = "Springer",
pages = "1--4",
editor = "{E Obermeier}",
booktitle = "Transducers'01: technical papers. Vol. 1/2",
note = "11th International Conference on Solid-State Sensors and Actuators, Munich ; Conference date: 10-06-2001 Through 14-06-2001",
}