Planarized nanophotonic sensor for real-time fluid sensing

Yazhao Liu, H. W.M. Salemink*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
41 Downloads (Pure)


A planarized on-chip nanophotonic sensor based on a photonic crystal cavity is realized in this work. The sensor was embedded in a solid protecting material (flowable oxide) with perfect filled holes: this eliminates problems of fouling in practical applications. The functional area of the sensor is created by carefully removing the protecting material only on the top surface of the cavity. A wavelength shift of 7.5 nm was observed in experiment which is very close to a simulation result of 9.0 nm for sensing water (n=1.33) and crude oil (n=1.45) samples. Swift and accurate sensing was verified by a real-time dynamic measurement with rapidly alternating analytes in a microfluid channel.

Original languageEnglish
Article number095306
Number of pages7
JournalAIP Advances
Issue number9
Publication statusPublished - 2017


  • Photonic crystal waveguides
  • Chemical compounds
  • Crude oil
  • Optical properties
  • Electrical properties


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