Planer wafer transport and positioning on an air film using a viscous traction principle

J van Rij, J Wesselingh, RAJ van Ostayen, JW Spronck, RH Munnig Schmidt, J van Eijk

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{bdac311f517b4a3180b29d7f7b915585,

title = "Planer wafer transport and positioning on an air film using a viscous traction principle",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{van Rij}, J and J Wesselingh and {van Ostayen}, RAJ and JW Spronck and {Munnig Schmidt}, RH and {van Eijk}, J",

year = "2009",

language = "Undefined/Unknown",

volume = "2009",

pages = "1--8",

journal = "Tribology International",

issn = "0301-679X",

publisher = "Elsevier",

number = "03",

}

TY - JOUR

T1 - Planer wafer transport and positioning on an air film using a viscous traction principle

AU - van Rij, J

AU - Wesselingh, J

AU - van Ostayen, RAJ

AU - Spronck, JW

AU - Munnig Schmidt, RH

AU - van Eijk, J

PY - 2009

Y1 - 2009

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0301-679X

VL - 2009

SP - 1

EP - 8

JO - Tribology International

JF - Tribology International

IS - 03

ER -