Planer wafer transport and positioning on an air film using a viscous traction principle

J van Rij, J Wesselingh, RAJ van Ostayen, JW Spronck, RH Munnig Schmidt, J van Eijk

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)1-8
Number of pages8
JournalTribology International
Issue number03
Publication statusPublished - 2009


  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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