Original language | Undefined/Unknown |
---|---|
Title of host publication | 2nd Annual Workshop on Semiconductor Advances for Future Electronics (SAFE). |
Pages | - |
Publication status | Published - 1999 |
Plasma induced charging damage of gate oxides.
RG van Veen, AH Verbruggen, EWJM van der Drift, S Radelaar, S Anders, HM Jaeger, Z Wang, P Tanner, C Salm, T Mouthaan, F Kuper, MSP Andriesse
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific