Abstract
This report introduces a novel optofluidic platform based on piezo-microelectromechanical systems (MEMS) technology, capable of identifying subtle variations in the fluid concentration. The system utilizes piezoelectric micromachined ultrasound transducers (PMUTs) as receivers to capture sound waves produced by nanosecond photoacoustic (PA) pulses emanating from a fluid target housed in PDMS microchannels. Additionally, a dedicated low-noise single-channel amplifier has been developed to extract the minute analog voltage signals from the PMUTs, given the inherently weak ultrasound signals generated by fluid targets. The PMUTs' proficiency in detecting changes in fluid concentration under both static and time-varying conditions has been documented and verified, confirming the platform's efficacy in monitoring fluid concentrations.
| Original language | English |
|---|---|
| Article number | 9510408 |
| Number of pages | 8 |
| Journal | IEEE Transactions on Instrumentation and Measurement |
| Volume | 73 |
| DOIs | |
| Publication status | Published - 2024 |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Keywords
- Fluids
- MEMS
- Microfluidics
- Micromechanical devices
- Photoacoustics
- PMUT
- Receivers
- Silicon
- Transducers
- Ultrasonic imaging
- Ultrasound