Polarization-Selective Optical Lithography

MP Van

Research output: Thesis › Dissertation (external, preparation TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Supervisors/Advisors
  • Broer, JC, Promotor, External person
  • Urbach, H.P., Copromotor
  • Bastiaanse, CWM, Copromotor, External person
  • Benschop, JPH, Copromotor, External person
  • Huskens, J, Copromotor, External person
  • Sijbesma, RP, Copromotor, External person
Award date22 Jan 2015
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-3760-0
Publication statusPublished - 2015

Keywords

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  • Geen BTA classificatie

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