Polarization-Selective Optical Lithography

MP Van

Research output: ThesisDissertation (external, preparation TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
  • Broer, JC, Supervisor, External person
  • Urbach, H.P., Advisor
  • Bastiaanse, CWM, Advisor, External person
  • Benschop, JPH, Advisor, External person
  • Huskens, J, Advisor, External person
  • Sijbesma, RP, Advisor, External person
Award date22 Jan 2015
Place of PublicationEindhoven
Print ISBNs978-90-386-3760-0
Publication statusPublished - 2015


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