Poly-silicon films with low impurity concentrtion made by hot wire chemical vapour deposition.

REI Schropp, PFA Alkemade, JK Rath

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)541-547
    Number of pages7
    JournalSolar Energy Materials & Solar Cells
    Volume65
    Publication statusPublished - 2001

    Keywords

    • ZX Int.klas.verslagjaar < 2002

    Cite this