Poly-silicon films with low impurity concentrtion made by hot wire chemical vapour deposition.

REI Schropp, PFA Alkemade, JK Rath

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	541-547
Number of pages	7
Journal	Solar Energy Materials & Solar Cells
Volume	65
Publication status	Published - 2001

Keywords

@article{ede872cc7aa94582a879c0d1f1e8ceaf,

title = "Poly-silicon films with low impurity concentrtion made by hot wire chemical vapour deposition.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "REI Schropp and PFA Alkemade and JK Rath",

year = "2001",

language = "Undefined/Unknown",

volume = "65",

pages = "541--547",

journal = "Solar Energy Materials & Solar Cells",

issn = "0927-0248",

publisher = "North-Holland",

}