Polyimide as a sacrificial layer for postprocessing surface micromachining

Electronic Components, Technology and Materials

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	S.l.
Publisher	s.n.
Number of pages	18
Publication status	Published - 2000

Publication series

Name
Publisher	S.n.

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this