Polyimide sacrificial layer and novel materials for post-processing surface micromachining

A Bagolini, L Pakula, TLM Scholtes, TMH Pham, PJ French, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

86 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)385-389
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume12
Publication statusPublished - 2002

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS 1.00 <= JFIS < 3.00

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