Polyimide sacrificial layer for an all-dray post-process surface micromachining module

TMH Pham, A Bagolini, CR de Boer, JMW Laros, L Pakula, PJ French, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationTransducers'03 Digest of technical papers
Place of PublicationPiscataway
PublisherIEEE
Pages813-816
Number of pages4
ISBN (Print)0-7803-7731-1
Publication statusPublished - 2003
Event12th International conference on solid state sensors, actuators and microsystems, Boston - Piscataway
Duration: 8 Jun 200312 Jun 2003

Publication series

Name
PublisherIEEE
Name
Volume1 & 2

Conference

Conference12th International conference on solid state sensors, actuators and microsystems, Boston
Period8/06/0312/06/03

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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