Polyimide sacrificial layer for an all-dray post-process surface micromachining module

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Transducers'03 Digest of technical papers
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	813-816
Number of pages	4
ISBN (Print)	0-7803-7731-1
Publication status	Published - 2003
Event	12th International conference on solid state sensors, actuators and microsystems, Boston - Piscataway Duration: 8 Jun 2003 → 12 Jun 2003

Name
Publisher	IEEE

Name
Volume	1 & 2

Conference	12th International conference on solid state sensors, actuators and microsystems, Boston
Period	8/06/03 → 12/06/03

Keywords

@inproceedings{4c1fad548ab74f75bbe74a8cc40fec3f,

title = "Polyimide sacrificial layer for an all-dray post-process surface micromachining module",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "TMH Pham and A Bagolini and {de Boer}, CR and JMW Laros and L Pakula and PJ French and PM Sarro",

year = "2003",

language = "Undefined/Unknown",

isbn = "0-7803-7731-1",

publisher = "IEEE Society",

pages = "813--816",

booktitle = "Transducers'03 Digest of technical papers",

note = "12th International conference on solid state sensors, actuators and microsystems, Boston ; Conference date: 08-06-2003 Through 12-06-2003",

}

TY - GEN

T1 - Polyimide sacrificial layer for an all-dray post-process surface micromachining module

AU - Pham, TMH

AU - Bagolini, A

AU - de Boer, CR

AU - Laros, JMW

AU - Pakula, L

AU - French, PJ

AU - Sarro, PM

PY - 2003

Y1 - 2003

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-7731-1

SP - 813

EP - 816

BT - Transducers'03 Digest of technical papers

PB - IEEE Society

CY - Piscataway

T2 - 12th International conference on solid state sensors, actuators and microsystems, Boston

Y2 - 8 June 2003 through 12 June 2003

ER -