@inproceedings{4c1fad548ab74f75bbe74a8cc40fec3f,
title = "Polyimide sacrificial layer for an all-dray post-process surface micromachining module",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "TMH Pham and A Bagolini and {de Boer}, CR and JMW Laros and L Pakula and PJ French and PM Sarro",
year = "2003",
language = "Undefined/Unknown",
isbn = "0-7803-7731-1",
publisher = "IEEE",
pages = "813--816",
booktitle = "Transducers'03 Digest of technical papers",
address = "United States",
note = "12th International conference on solid state sensors, actuators and microsystems, Boston ; Conference date: 08-06-2003 Through 12-06-2003",
}