Polyimide sacrificial layer for postprocessing surface micromachining

A Bagolini, TLM Scholtes, HMT Pham, L Pakula, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationMME 2001
Place of PublicationS.l.
Publishers.n.
Pages58-61
Number of pages4
Publication statusPublished - 2001
Event12th Micromechanics Europe Workshop, Cork - S.l.
Duration: 16 Sep 200118 Sep 2001

Publication series

Name
PublisherS.n.

Conference

Conference12th Micromechanics Europe Workshop, Cork
Period16/09/0118/09/01

Keywords

  • ZX Int.klas.verslagjaar < 2002

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