Polyimide sacrificial layer for postprocessing surface micromachining

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	MME 2001
Place of Publication	S.l.
Publisher	s.n.
Pages	58-61
Number of pages	4
Publication status	Published - 2001
Event	12th Micromechanics Europe Workshop, Cork - S.l. Duration: 16 Sept 2001 → 18 Sept 2001

Name
Publisher	S.n.

Conference	12th Micromechanics Europe Workshop, Cork
Period	16/09/01 → 18/09/01

Keywords

@inproceedings{cdd7dc07a1504632a2aacfc047334022,

title = "Polyimide sacrificial layer for postprocessing surface micromachining",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "A Bagolini and TLM Scholtes and HMT Pham and L Pakula and PM Sarro",

year = "2001",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "58--61",

booktitle = "MME 2001",

note = "12th Micromechanics Europe Workshop, Cork ; Conference date: 16-09-2001 Through 18-09-2001",

}

TY - GEN

T1 - Polyimide sacrificial layer for postprocessing surface micromachining

AU - Bagolini, A

AU - Scholtes, TLM

AU - Pham, HMT

AU - Pakula, L

AU - Sarro, PM

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 58

EP - 61

BT - MME 2001

PB - s.n.

CY - S.l.

T2 - 12th Micromechanics Europe Workshop, Cork

Y2 - 16 September 2001 through 18 September 2001

ER -