Polymer constraint effect for electrothermal bimorph microactuators

T Chu Duc, GK Lau, PM Sarro

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The authors report on the analysis of the polymer constraint effect and its use for a micromachined electrothermal bimorph actuator. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young's modulus of the constrained polymer blocks are significantly improved, compared with the no constraint case. The calculation that agrees well with experimental results provides the means to optimize the design of the constrained polymer stack electrothermal microactuator.
Original languageUndefined/Unknown
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Issue number101902
Publication statusPublished - 2007


  • Elektrotechniek
  • Techniek
  • academic journal papers
  • CWTS JFIS >= 2.00

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