Polymeric thermal microactuator with embedded silicon skeleton: Part II¿Fabrication, characterization, and application

T Chu Duc, GK Lau, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

40 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)823-831
Number of pages9
JournalIEEE Journal of Microelectromechanical Systems
Volume17
Issue number4
Publication statusPublished - 2008

Keywords

  • CWTS JFIS >= 2.00

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