Polymeric thermal microactuator with embedded silicon skeleton: part I-design and analysis

GK Lau, JFL Goosen, F van Keulen, T Chu Duc, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)809-822
Number of pages14
JournalIEEE Journal of Microelectromechanical Systems
Volume17
Issue number4
Publication statusPublished - 2008

Keywords

  • academic journal papers
  • CWTS JFIS >= 2.00

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