Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 809-822 |
Number of pages | 14 |
Journal | IEEE Journal of Microelectromechanical Systems |
Volume | 17 |
Issue number | 4 |
Publication status | Published - 2008 |
Keywords
- academic journal papers
- CWTS JFIS >= 2.00
GK Lau, JFL Goosen, F van Keulen, T Chu Duc, PM Sarro
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 809-822 |
Number of pages | 14 |
Journal | IEEE Journal of Microelectromechanical Systems |
Volume | 17 |
Issue number | 4 |
Publication status | Published - 2008 |