Polymeric thermal microactuator with embedded silicon skeleton: part I-design and analysis

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	809-822
Number of pages	14
Journal	IEEE Journal of Microelectromechanical Systems
Volume	17
Issue number	4
Publication status	Published - 2008

Keywords

@article{a9181b88297c402790ff861b668bc542,

title = "Polymeric thermal microactuator with embedded silicon skeleton: part I-design and analysis",

keywords = "academic journal papers, CWTS JFIS >= 2.00",

author = "GK Lau and JFL Goosen and {van Keulen}, F and {Chu Duc}, T and PM Sarro",

year = "2008",

language = "Undefined/Unknown",

volume = "17",

pages = "809--822",

journal = "IEEE Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE",

number = "4",

}

TY - JOUR

T1 - Polymeric thermal microactuator with embedded silicon skeleton: part I-design and analysis

AU - Lau, GK

AU - Goosen, JFL

AU - van Keulen, F

AU - Chu Duc, T

AU - Sarro, PM

PY - 2008

Y1 - 2008

KW - academic journal papers

KW - CWTS JFIS >= 2.00

M3 - Article

SN - 1057-7157

VL - 17

SP - 809

EP - 822

JO - IEEE Journal of Microelectromechanical Systems

JF - IEEE Journal of Microelectromechanical Systems

IS - 4

ER -