Polysilicon: a versatile material for microsystems

Research output: Contribution to journalArticleScientificpeer-review

128 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)3-12
Number of pages10
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
VolumeA 99
Publication statusPublished - 2002

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS 1.00 <= JFIS < 3.00

Cite this