Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium

A van Veen, R Escobar Galindo, SWH Eijt, H Schut, H van Gog, AR Balkenende, F.K. de Theije

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Keywords

@article{b96edef1cd434e98992bf2f051aa3870,

title = "Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium",

keywords = "ZX CWTS JFIS < 1.00",

author = "{van Veen}, A and {Escobar Galindo}, R and SWH Eijt and H Schut and {van Gog}, H and AR Balkenende and {de Theije}, F.K.",

year = "2004",

language = "Undefined/Unknown",

volume = "445-446",

pages = "254--258",

journal = "Materials Science Forum",

issn = "0255-5476",

publisher = "Trans Tech Publications",

}

TY - JOUR

T1 - Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium

AU - van Veen, A

AU - Escobar Galindo, R

AU - Eijt, SWH

AU - Schut, H

AU - van Gog, H

AU - Balkenende, AR

AU - de Theije, F.K.

PY - 2004

Y1 - 2004

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0255-5476

VL - 445-446

SP - 254

EP - 258

JO - Materials Science Forum

JF - Materials Science Forum

ER -