Positioning More-than-Moore characterization needs within the 2011 ITRS

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    4 Citations (Scopus)
    Original languageEnglish
    Title of host publicationFrontiers of Characterization and Metrology for Nanoelectronics 2011
    EditorsD Seiler, A Diebold, B McDonald, et al.
    Place of PublicationGrenoble, France
    PublisherAIP
    Pages345-350
    Number of pages6
    ISBN (Print)978-0-7354-0965-1
    DOIs
    Publication statusPublished - 2011
    EventFrontiers of Characterization and Metrology for Nanoelectronics 2011 - Grenoble, France
    Duration: 23 May 201126 May 2011

    Publication series

    Name
    PublisherAIP
    NameAIP Conference Proceedings
    Volume1395
    ISSN (Print)0094-243X

    Conference

    ConferenceFrontiers of Characterization and Metrology for Nanoelectronics 2011
    Period23/05/1126/05/11

    Keywords

    • conference contrib. refereed
    • Conf.proc. > 3 pag

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