Positioning Pd catalyst particles for carbon nanotube growth using charge patterns created with a scanning electron microscope

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)3048-3050
    Number of pages3
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume27
    Issue number6
    Publication statusPublished - 2009

    Keywords

    • CWTS JFIS < 0.75

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