Positron annihilation as a tool for the study of defects in the MOS system

JMM de Nijs, M Clement, H Schut, A van Veen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	35-42
Number of pages	8
Journal	Microelectronic Engineering
Volume	36
Publication status	Published - 1997

Cite this

@article{19455865d594400993361b5529ce9753,

title = "Positron annihilation as a tool for the study of defects in the MOS system",

author = "{de Nijs}, JMM and M Clement and H Schut and {van Veen}, A",

year = "1997",

language = "Undefined/Unknown",

volume = "36",

pages = "35--42",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}