Positron annihilation as a tool for the study of defects in the MOS system

JMM de Nijs, M Clement, H Schut, A van Veen

    Research output: Contribution to journalArticlepeer-review

    Original languageUndefined/Unknown
    Pages (from-to)35-42
    Number of pages8
    JournalMicroelectronic Engineering
    Volume36
    Publication statusPublished - 1997

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