Positron annihilation studies of high dose Sb implanted silicon

H Schut; SWH Eijt; CD Beling; K Ho; Y Takamura

Positron annihilation studies of high dose Sb implanted silicon

H Schut, SWH Eijt, CD Beling, K Ho, Y Takamura

Research output: Contribution to conference › Poster › Professional

Original language	Undefined/Unknown
Publication status	Published - 2005
Event	E-MRS Spring Meeting Symposium D: Materials science and device issues for future Si-based technologies - Strasbourg, France Duration: 31 May 2005 → 3 Jun 2005

Other

Other	E-MRS Spring Meeting Symposium D: Materials science and device issues for future Si-based technologies
Period	31/05/05 → 3/06/05

Keywords

Geen BTA classificatie

Cite this

@conference{00c7077fc4bd41bf85f9c785193a399e,

title = "Positron annihilation studies of high dose Sb implanted silicon",

keywords = "Geen BTA classificatie",

author = "H Schut and SWH Eijt and CD Beling and K Ho and Y Takamura",

year = "2005",

language = "Undefined/Unknown",

note = "E-MRS Spring Meeting Symposium D: Materials science and device issues for future Si-based technologies ; Conference date: 31-05-2005 Through 03-06-2005",

}