Positron annihilation studies of high dose Sb implanted silicon

H Schut, SWH Eijt, CD Beling, K Ho, Y Takamura

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	283-287
Number of pages	5
Journal	Materials Science and Engineering B: Advanced Functional Solid-state Materials
Volume	124-125
Publication status	Published - 2005

Keywords

@article{de0e5272c1704702a92986d3dae724cd,

title = "Positron annihilation studies of high dose Sb implanted silicon",

keywords = "ZX CWTS JFIS < 1.00",

author = "H Schut and SWH Eijt and CD Beling and K Ho and Y Takamura",

year = "2005",

language = "Undefined/Unknown",

volume = "124-125",

pages = "283--287",

journal = "Materials Science and Engineering B: Advanced Functional Solid-state Materials",

issn = "0921-5107",

publisher = "Elsevier",

}

TY - JOUR

T1 - Positron annihilation studies of high dose Sb implanted silicon

AU - Schut, H

AU - Eijt, SWH

AU - Beling, CD

AU - Ho, K

AU - Takamura, Y

PY - 2005

Y1 - 2005

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0921-5107

VL - 124-125

SP - 283

EP - 287

JO - Materials Science and Engineering B: Advanced Functional Solid-state Materials

JF - Materials Science and Engineering B: Advanced Functional Solid-state Materials

ER -