Positron beam analysis of ion implantation defects in silicon and metal oxides

A van Veen, H Schut, PE Mijnarends

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the Workshop on Ion and Slow Positron Beam Utilisation
Pages	49-60
Number of pages	12
Publication status	Published - 1999

Keywords

@inproceedings{e634417f92c549338d26737e8d7b153a,

title = "Positron beam analysis of ion implantation defects in silicon and metal oxides",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van Veen}, A and H Schut and PE Mijnarends",

year = "1999",

language = "Undefined/Unknown",

pages = "49--60",

booktitle = "Proceedings of the Workshop on Ion and Slow Positron Beam Utilisation",

}