Positron beam and Raman analysis of hydrogen plasma treated and annealed Cz-Si

H Schut, A van Veen, SWH Eijt, R Job, AG Ulyasin, WR Fahrner

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	94-99
Number of pages	6
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	186
Publication status	Published - 2002

Keywords

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title = "Positron beam and Raman analysis of hydrogen plasma treated and annealed Cz-Si",

keywords = "ZX CWTS JFIS < 1.00",

author = "H Schut and {van Veen}, A and SWH Eijt and R Job and AG Ulyasin and WR Fahrner",

year = "2002",

language = "Undefined/Unknown",

volume = "186",

pages = "94--99",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

}

TY - JOUR

T1 - Positron beam and Raman analysis of hydrogen plasma treated and annealed Cz-Si

AU - Schut, H

AU - van Veen, A

AU - Eijt, SWH

AU - Job, R

AU - Ulyasin, AG

AU - Fahrner, WR

PY - 2002

Y1 - 2002

KW - ZX CWTS JFIS < 1.00

M3 - Article

SN - 0168-583X

VL - 186

SP - 94

EP - 99

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

ER -