Possibilities for application of electrochemical deposition of Cu for hole and channel filling in Si substrates

VG Kiutchoukov, Ph Philipov

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Annual school lectures
Editors	Ph Philipov
Place of Publication	Sofia
Publisher	s.n.
Pages	145-159
Number of pages	15
ISBN (Print)	0861-0797
Publication status	Published - 1999
Event	20th International Spring Seminar on Semiconductor and Hybrid Technologies, Sofia - Sofia Duration: 1 Jan 1998 → 1 Jan 1998

Name
Publisher	S.n.

Conference	20th International Spring Seminar on Semiconductor and Hybrid Technologies, Sofia
Period	1/01/98 → 1/01/98

Keywords

@inproceedings{313c1e209d4f41a5a138540cc63315b0,

title = "Possibilities for application of electrochemical deposition of Cu for hole and channel filling in Si substrates",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "VG Kiutchoukov and Ph Philipov",

year = "1999",

language = "Undefined/Unknown",

isbn = "0861-0797",

publisher = "s.n.",

pages = "145--159",

editor = "{Ph Philipov}",

booktitle = "Annual school lectures",

note = "20th International Spring Seminar on Semiconductor and Hybrid Technologies, Sofia ; Conference date: 01-01-1998 Through 01-01-1998",

}

TY - GEN

T1 - Possibilities for application of electrochemical deposition of Cu for hole and channel filling in Si substrates

AU - Kiutchoukov, VG

AU - Philipov, Ph

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0861-0797

SP - 145

EP - 159

BT - Annual school lectures

A2 - Ph Philipov, null

PB - s.n.

CY - Sofia

T2 - 20th International Spring Seminar on Semiconductor and Hybrid Technologies, Sofia

Y2 - 1 January 1998 through 1 January 1998

ER -